Miniature Fourier Transform Spectrometer Based on Thin-Film Lithium Niobate

Lichao Zhang; Guangyang Gou; Jiamin Chen; Wangzhe Li; Weichao Ma; Ruoming Li; Junming An; Yue Wang; Yuanyuan Liu; Wei Yan; Tianjun Ma; Chunxiu Liu; Jianjun Cheng; Zhimei Qi; Ning Xue

doi:10.3390/mi14020458

Miniature Fourier Transform Spectrometer Based on Thin-Film Lithium Niobate

Micromachines (Basel). 2023 Feb 15;14(2):458. doi: 10.3390/mi14020458.

Authors

Lichao Zhang^{1

2}, Guangyang Gou^{1

2}, Jiamin Chen^{1

2}, Wangzhe Li^{1

2}, Weichao Ma^{1

2}, Ruoming Li^{1

2}, Junming An³, Yue Wang³, Yuanyuan Liu^{3

4}, Wei Yan³, Tianjun Ma^{1

2}, Chunxiu Liu^{1

2}, Jianjun Cheng⁵, Zhimei Qi^{1

2}, Ning Xue^{1

2}

Affiliations

¹ State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
² School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
³ Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
⁴ Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
⁵ School of Integrated Circuit, Quanzhou University of Information Engineering, Quanzhou 362000, China.

Abstract

A miniature Fourier transform spectrometer is proposed using a thin-film lithium niobate electro-optical modulator instead of the conventional modulator made by titanium diffusion in lithium niobate. The modulator was fabricated by a contact lithography process, and its voltage-length and optical waveguide loss were 2.26 V·cm and 1.01 dB/cm, respectively. Based on the wavelength dispersion of the half-wave voltage of the fabricated modulator, the emission spectrum of the input signal was retrieved by Fourier transform processing of the interferogram, and the analysis of the experimental data of monochromatic light shows that the proposed miniaturized FTS can effectively identify the input signal wavelength.

Keywords: Fourier transform spectrometer; electro-optical modulation; lithium niobate.

Abstract

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