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The Effect of Doping on the Digital Etching of Silicon-Selective Silicon-Germanium Using Nitric Acids.
Nanomaterials (Basel). 2021 May 3;11(5):1209. doi: 10.3390/nano11051209.
Nanomaterials (Basel). 2021.
PMID: 34063569
Free PMC article.
CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology.
Radamson HH, Miao Y, Zhou Z, Wu Z, Kong Z, Gao J, Yang H, Ren Y, Zhang Y, Shi J, Xiang J, Cui H, Lu B, Li J, Liu J, Lin H, Xu H, Li M, Cao J, He C, Duan X, Zhao X, Su J, Du Y, Yu J, Wu Y, Jiang M, Liang D, Li B, Dong Y, Wang G.
Radamson HH, et al.
Nanomaterials (Basel). 2024 May 9;14(10):837. doi: 10.3390/nano14100837.
Nanomaterials (Basel). 2024.
PMID: 38786792
Free PMC article.
Review.
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