Boron diffusion in strained Si1-xGex epitaxial layers
Phys Rev Lett
.
1993 Aug 9;71(6):883-886.
doi: 10.1103/PhysRevLett.71.883.
Authors
N Moriya
,
LC Feldman
,
HS Luftman
,
CA King
,
J Bevk
,
B Freer
PMID:
10055392
DOI:
10.1103/PhysRevLett.71.883
No abstract available