Time-resolved acquisition technique for elemental mapping by energy-filtering TEM

S Terada; T Aoyama; F Yano; Y Mitsui

doi:10.1093/jmicro/50.2.83

Time-resolved acquisition technique for elemental mapping by energy-filtering TEM

J Electron Microsc (Tokyo). 2001;50(2):83-7. doi: 10.1093/jmicro/50.2.83.

Authors

S Terada¹, T Aoyama, F Yano, Y Mitsui

Affiliation

¹ Hitachi Research Laboratory, Hitachi Ltd, Ibaraki, Japan. [email protected]

PMID: 11347715
DOI: 10.1093/jmicro/50.2.83

Abstract

A time-resolved acquisition technique for elemental mapping has been investigated for the heavy element barium (Ba) in (Ba(0.5), Sr(0.5)TiO3 (BST) by energy-filtering transmission electron microscopy (EF-TEM). Based on the conventional three-window method, five images were separately acquired for each energy region (about 780 eV signal region, and pre-1 and pre-2 energy regions). After correcting for image shift, the five images were added to form a new processed image in each energy region. Then, Ba element mapping was performed by using the conventional three-window procedure. This time-resolved technique was found to improve signal-to-noise ratio for 100 s total exposure time without increasing the image blurring problem.