X-ray multilayer monochromator with enhanced performance

Appl Opt. 2002 Jan 1;41(1):239-44. doi: 10.1364/ao.41.000239.

Abstract

An x-ray multilayer monochromator with improved resolution and a low specular background is presented. The monochromator consists of a lamellar multilayer amplitude grating with appropriate parameters used at the zeroth diffraction order. The device is fabricated by means of combining deposition of thin films on a nanometer scale, UV lithography, and reactive ion etching. The performance of this new monochromator at photon energies near 1500 eV is shown.