Nanochemistry at the atomic scale revealed in hydrogen-induced semiconductor surface metallization

Nat Mater. 2003 Apr;2(4):253-8. doi: 10.1038/nmat835.

Abstract

Passivation of semiconductor surfaces against chemical attack can be achieved by terminating the surface-dangling bonds with a monovalent atom such as hydrogen. Such passivation invariably leads to the removal of all surface states in the bandgap, and thus to the termination of non-metallic surfaces. Here we report the first observation of semiconductor surface metallization induced by atomic hydrogen. This result, established by using photo-electron and photo-absorption spectroscopies and scanning tunnelling techniques, is achieved on a Si-terminated cubic silicon carbide (SiC) surface. It results from competition between hydrogen termination of surface-dangling bonds and hydrogen-generated steric hindrance below the surface. Understanding the ingredient for hydrogen-stabilized metallization directly impacts the ability to eliminate electronic defects at semiconductor interfaces critical for microelectronics, provides a means to develop electrical contacts on high-bandgap chemically passive materials, particularly for interfacing with biological systems, and gives control of surfaces for lubrication, for example of nanomechanical devices.

MeSH terms

  • Adsorption
  • Carbon Compounds, Inorganic / chemistry*
  • Crystallography / methods*
  • Hydrogen / chemistry*
  • Hydrogen Bonding
  • Materials Testing / methods*
  • Metals / chemistry*
  • Microchemistry / methods
  • Microscopy, Scanning Tunneling / methods
  • Models, Molecular
  • Nanotechnology / instrumentation
  • Nanotechnology / methods*
  • Semiconductors
  • Silicon Compounds / chemistry*
  • Spectrum Analysis / methods
  • Surface Properties

Substances

  • Carbon Compounds, Inorganic
  • Metals
  • Silicon Compounds
  • Hydrogen
  • silicon carbide