Fabrication of silica nanotube arrays from vertical silicon nanowire templates

Rong Fan; Yiying Wu; Deyu Li; Min Yue; Arun Majumdar; Peidong Yang

doi:10.1021/ja034163+

Fabrication of silica nanotube arrays from vertical silicon nanowire templates

J Am Chem Soc. 2003 May 7;125(18):5254-5. doi: 10.1021/ja034163+.

Authors

Rong Fan¹, Yiying Wu, Deyu Li, Min Yue, Arun Majumdar, Peidong Yang

Affiliation

¹ Department of Chemistry, University of California, Berkeley, California 94720, USA.

PMID: 12720419
DOI: 10.1021/ja034163+

Abstract

A simple thermal oxidation-etching process was developed to translate vertical silicon nanowire arrays into silica nanotube arrays. The obtained nanotubes perfectly retain the orientation of original silicon nanowire arrays. The inner tube diameter ranges from 10 to 200 nm. High-temperature oxidation produces relative thick, rigid, and pinhole-free walls that are made of condensed silica. This method could be useful for fabrication of single nanotube sensors and nanofluidic systems.