Electrochemical lithography: fabrication of nanoscale Si tips by porous anodization of Al/Si wafer

Chem Commun (Camb). 2004 Apr 21:(8):942-3. doi: 10.1039/b315810a. Epub 2004 Mar 18.

Abstract

Porous anodization of Al/Si wafer in sulfuric acid results in the formation of Si nanotips on the surface of Si substrate with ultrahigh packing density.