This article applied [HEH(HEP)] (2-ethyhexyldrogen-2-ethylhexyl phosphonate) extraction chromatography to separate 14 rare earth impurities from ultra-highly pure Er2O3 and Ho2O3, and then the impurities were determined by atomic emission spectrometry. The average percentage recovery for each element is in the range of 70%-140%. The relative standard deviations of the determination are +/- 3.3%-2.2%. This method can be applied to the determination of the trace amounts of rare eath impurities in Er2O3 and Ho2O3 with a purity of 99.9999%-99.99999%.