TaSi2 nanowires: A potential field emitter and interconnect

Nano Lett. 2006 Aug;6(8):1637-44. doi: 10.1021/nl060614n.

Abstract

TaSi2 nanowires have been synthesized on a Si substrate by annealing NiSi2 films at 950 degrees C in an ambient containing Ta vapor. The nanowires could be grown up to 13 microm in length. Field-emission measurements show that the turn-on field is low at 4-4.5 V/microm and the threshold field is down to 6 V/microm with the field enhancement factor as high as 1800. The metallic TaSi2 nanowires exhibit excellent electrical properties with a remarkable high failure current density of 3 x 10(8) A cm(-2). In addition, effects of annealing temperatures and capability of metal silicide mediation layer on the growth of nanowires are addressed. This simple approach promises future applications in nanoelectronics and nano-optoelectronics.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Crystallization / methods
  • Electric Conductivity
  • Electric Wiring*
  • Electromagnetic Fields
  • Equipment Design
  • Equipment Failure Analysis
  • Feasibility Studies
  • Materials Testing
  • Nanotechnology / instrumentation*
  • Nanotechnology / methods
  • Nanotubes / chemistry*
  • Nanotubes / ultrastructure*
  • Particle Size
  • Semiconductors
  • Silicon / analysis
  • Silicon / chemistry*
  • Tantalum / analysis
  • Tantalum / chemistry*
  • Temperature

Substances

  • Tantalum
  • Silicon