This study evaluated the time, occurrence of fracture, and quality of apical cavity preparation with three different ultrasonic diamond tips: Satelec, Trinity, and a new type, CVD (chemical vapor deposition), using scanning electron microscopy (SEM) analysis. Thirty human single-rooted premolars were selected, submitted to apicectomy, and prepared with ultrasonic tips; impressions were then obtained. The presence of fractures was evaluated on the impressions, and the quality of preparation was evaluated by SEM analysis of teeth and scoring by two examiners. The group prepared with the CVD tips exhibited the shorter preparation time and did not present fractures. There was no statistically significant difference in the quality of preparation for the three tips. The three brands of ultrasonic tips produced adequate grinding without altering the morphology of the apical foramen.