Lateral self-aligned p-type In2O3 nanowire arrays epitaxially grown on Si substrates

Nano Lett. 2007 Jun;7(6):1799-803. doi: 10.1021/nl0707914. Epub 2007 May 22.

Abstract

Lateral orientated growth of In2O3 nanowire (NW) and nanorod (NR) arrays has been achieved by a vapor transport and condensation method on (001) and (111) surfaces of Si substrates. The single crystalline In2O3 NWs and NRs were grown along [211] in parallel to the Si +/-[110] and lying in the substrate plane. The electrical measurements show that the In2O3 NWs are p-type semiconductor. By N+ doping, the resistivity of the In2O3 NWs has been tuned. The lateral self-aligned In2O3 NW and NR arrays on Si can offer some unique advantages for fabricating parallel nanodevices that can be integrated directly with silicon technology.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Crystallization / methods*
  • Indium / chemistry*
  • Macromolecular Substances / chemistry
  • Materials Testing
  • Molecular Conformation
  • Nanotechnology / methods*
  • Nanotubes / chemistry*
  • Nanotubes / ultrastructure*
  • Particle Size
  • Silicon / chemistry*
  • Surface Properties

Substances

  • Macromolecular Substances
  • Indium
  • indium oxide
  • Silicon