Experimental comparison of time-of-flight mass analysis with magnetic mass analysis

V I Gushenets; A S Bugaev; E M Oks; T V Kulevoy; A Hershcovitch; I G Brown

doi:10.1063/1.2802593

Experimental comparison of time-of-flight mass analysis with magnetic mass analysis

Rev Sci Instrum. 2008 Feb;79(2 Pt 2):02B701. doi: 10.1063/1.2802593.

Authors

V I Gushenets¹, A S Bugaev, E M Oks, T V Kulevoy, A Hershcovitch, I G Brown

Affiliation

¹ High Current Electronics Institute, Russian Academy of Sciences, Tomsk, Russia.

PMID: 18315192
DOI: 10.1063/1.2802593

Abstract

A series of experiments was carried out in which both a magnetic analyzer (mass separator) and a time-of-flight (TOF) spectrometer were used for ion charge/mass spectral analysis of the ion beam formed by a dc Bernas ion source made for semiconductor implantation. The TOF analyzer was a detachable device that provides rapid analysis of charge-to-mass composition of moderate energy ion beams. The magnetic analyzer was a massive device using a 90 degrees -sector bending magnet with radius of the central orbit of 35 cm. Comparison of these two methods for measuring ion beam composition shows good agreement.