From nanorings to nanodots by patterning with block copolymers

Nano Lett. 2008 Jun;8(6):1667-72. doi: 10.1021/nl0805110. Epub 2008 Apr 30.

Abstract

We demonstrate three different transfer patterns that can be achieved by use of a surface reconstructed block copolymer film where metal is evaporated onto the surface of the film, providing the contrast. Thin films of diblock copolymers having cylindrical microdomains oriented normal to the surface with long-range lateral order were used. Solvent reconstruction of the film, followed by a glancing angle metal evaporation and thermal annealing, led to three different decorations of the films with gold. These films were used as masks for pattern transfer of pores, columns, and rings to underlying substrate with high fidelity.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Crystallization / methods*
  • Gold / chemistry*
  • Macromolecular Substances / chemistry
  • Materials Testing
  • Molecular Conformation
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Nanotechnology / methods*
  • Particle Size
  • Phase Transition
  • Polymers / chemistry*
  • Surface Properties

Substances

  • Macromolecular Substances
  • Polymers
  • Gold