High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates from a low temperature process

Opt Express. 2008 Mar 3;16(5):3191-6. doi: 10.1364/oe.16.003191.

Abstract

We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150 nm to 3 nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400 degrees C SSPDs were fabricated on high quality NbN films of different thickness (7 to 3 nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the SSPDs. The highest QE value measured at 4.2K is 20% at 1300 nm.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Cold Temperature
  • Electric Conductivity
  • Equipment Design
  • Equipment Failure Analysis
  • Magnesium Oxide / chemistry*
  • Magnesium Oxide / radiation effects*
  • Nanotechnology / instrumentation
  • Nanotubes / chemistry*
  • Nanotubes / radiation effects*
  • Niobium / chemistry*
  • Optics and Photonics / instrumentation*
  • Sensitivity and Specificity
  • Transducers*

Substances

  • Niobium
  • Magnesium Oxide