Cobalt ferrite thin films have been deposited on fused quartz substrates by pulsed laser deposition at various substrate temperatures, T(s) (25 degrees C, 300 degrees C, 550 degrees C and 750 degrees C). Single phase, nanocrystalline, spinel cobalt ferrite formation is confirmed by X-ray diffraction (XRD) for T(s) > or = 300 degrees C. Conventional XRD studies reveal strong (111) texturing in the as deposited films with T(s) > or = 550 degrees C. Bulk texture measurements using X-ray orientation distribution function confirmed (111) preferred orientation in the films with T(s) > or = 550 degrees C. Grain size (13-16 nm for T(s) > or = 300 degrees C) estimation using grazing incidence X-ray line broadening analysis shows insignificant grain growth with increasing T(s), which is in good agreement with grain size data obtained from transmission electron microscopy.