Encapsulated tips for reliable nanoscale conduction in scanning probe technologies

Nanotechnology. 2009 Mar 11;20(10):105701. doi: 10.1088/0957-4484/20/10/105701. Epub 2009 Feb 17.

Abstract

Nanoscale tip apexes of conducting cantilever probes are important enablers for several conducting probe technologies that require reliable long-term operation, while preserving the nanoscale integrity of the tip apex. In this paper, the concept of an encapsulated tip with a nanoscale conducting core is presented. A method to fabricate such tips on conducting silicon microcantilevers is described. Long-term conduction and wear reliability of these nanoscale tips are evaluated systematically, and their ability to operate for sliding distances greater than 2 m in conduction and 11 m in wear on amorphous carbon is demonstrated. These results are expected to have an impact on the future of conducting probe-based technologies such as probe-based nanometrology, data storage and nanolithography.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Electric Conductivity
  • Equipment Design
  • Equipment Failure Analysis
  • Micro-Electrical-Mechanical Systems / instrumentation*
  • Microelectrodes*
  • Microscopy, Scanning Probe / instrumentation*
  • Microscopy, Scanning Probe / methods
  • Nanotechnology / methods*
  • Transducers*