Starting from tris(trimethylsilyl)silane the novel 2-chloro-3,4-bis-tris(trimethylsilyl)silyl-cyclo-diphospha-diazenium-tetrachloridogallate salt (7) was prepared in a six step synthetic procedure including the synthesis of N-tris(trimethylsilyl)silyl-aminodichlorophosphine (4) and 1,3-dichloro-2,4-bis-tris(trimethylsilyl)silyl-cyclo-diphospha-diazane (5). All intermediate products along the reaction path have been isolated and fully characterized. The thermally stable cyclo-diphospha-diazenium-tetrachloridogallate (7) represents an interesting example of a binary cyclic P(III)/N four-membered heterocyclic cation, with a di- and tricoordinated P atom and a delocalized bond along the NP(+)N unit. The structures of all compounds are discussed on the basis of experimental X-ray data. Moreover, for comparison the hitherto unknown 1-chloro-3-trifluoromethanesulfonato-2,4-bis-tris(trimethylsilyl)silyl-cyclo-diphosphadiazane (6) has been synthesized and fully characterized.