High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform

Opt Express. 2010 Aug 16;18(17):18278-83. doi: 10.1364/OE.18.018278.

Abstract

A new generation of Silicon-on-Insulator fiber-to-chip grating couplers which use a silicon overlay to enhance the directionality and thereby the coupling efficiency is presented. Devices are realized on a 200 mm wafer in a CMOS pilot line. The fabricated fiber couplers show a coupling efficiency of -1.6 dB and a 3 dB bandwidth of 80 nm.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Equipment Design
  • Fiber Optic Technology / instrumentation*
  • Nanotechnology / instrumentation*
  • Optics and Photonics / instrumentation*
  • Silicon / chemistry*
  • Temperature

Substances

  • Silicon