A study on low temperature transport properties of independent double-gated poly-Si nanowire transistors

Nanotechnology. 2010 Oct 29;21(43):435201. doi: 10.1088/0957-4484/21/43/435201. Epub 2010 Sep 29.

Abstract

Employing mix-and-match lithography of I-line stepper and e-beam direct writing, independent double-gated poly-Si nanowire thin film transistors with channel lengths ranging from 70 nm to 5 µm were fabricated and characterized. Electrical measurements performed under cryogenic ambient displayed intriguing characteristics in terms of length dependent abrupt switching behavior for one of the single-gated modes. Through simulation and experimental verification, the root cause for this phenomenon was identified to be the non-uniformly distributed dopants introduced by ion implantation.

Publication types

  • Research Support, Non-U.S. Gov't