Vacuum-ultraviolet quantum efficiency of a thinned, backside-illuminated charge-coupled device

Appl Opt. 1995 Aug 1;34(22):4640-50. doi: 10.1364/AO.34.004640.

Abstract

The UV quantum efficiency of a Scientific Imaging Technologies (SITe, Beaverton, Ore., formerly Tektronix) 1024 pixel by 1024 pixel thinned and backside-illuminated charge-coupled device has been measured in the wavelength band from 1164 to 5200 Å. The 24-µm-pixel device, which does not have an antireflective coating, has an average quantum efficiency of more than 40% in the band from 1164 to 4000 Å and a read noise of 15 e(-)/pixel.