Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime

Opt Express. 2011 Jan 3;19(1):175-84. doi: 10.1364/OE.19.000175.

Abstract

X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Equipment Design
  • Lenses
  • Microscopy / instrumentation*
  • Microscopy / methods
  • Microscopy, Electron, Scanning Transmission / instrumentation*
  • Microscopy, Electron, Scanning Transmission / methods
  • Optical Devices
  • Optical Phenomena
  • Scattering, Small Angle
  • X-Ray Diffraction / instrumentation*
  • X-Ray Diffraction / methods