Investigation of the error self-compensation effect associated with broadband optical monitoring

Appl Opt. 2011 Mar 20;50(9):C111-6. doi: 10.1364/AO.50.00C111.

Abstract

A rigorous definition of the error self-compensation effect is provided. An existence of this effect in the case of coating production with broadband optical monitoring of layer thicknesses is investigated for several widely used types of optical coatings.