Patterning of periodic high-aspect-ratio nanopores in anatase titanium dioxide from titanium fluoride hydrolysis

Nanoscale. 2011 May;3(5):2162-5. doi: 10.1039/c0nr01010c. Epub 2011 Apr 5.

Abstract

We report straight pores in titanium dioxide produced by a pattern transfer method with titanium fluoride hydrolysis. The resulting films on fluorine-doped tin oxide had pores with diameters of 30 nm and depths of 500 nm, corresponding to aspect ratios of 1:17.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Crystallization / methods*
  • Fluorides / chemistry*
  • Hydrolysis
  • Macromolecular Substances / chemistry
  • Materials Testing
  • Molecular Conformation
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Particle Size
  • Porosity
  • Surface Properties
  • Titanium / chemistry*

Substances

  • Macromolecular Substances
  • titanium dioxide
  • Titanium
  • Fluorides
  • titanium tetrafluoride