Easy fabrication of electrically insulating nanogaps by transfer printing

Small. 2011 Sep 5;7(17):2533-8. doi: 10.1002/smll.201100413. Epub 2011 Jul 27.

Abstract

An easy and cost-effective method to reproducibly fabricate nanogaps over a large area is introduced. Gold is evaporated on low-aspect-ratio polydimethylsiloxane (PDMS) stamps at an angle of 60°. Afterwards, the stamp is brought into contact with a silicon/silicon dioxide substrate and subsequently peeled at rates varying from 1 to 3 mm s(-1), resulting in the fabrication of nanogaps between two gold electrodes. The fabrication of insulating nanogaps with a width down to 50 nm is demonstrated.

Keywords: nanogap electrodes; nanopatterning; soft lithography; transfer printing.

Publication types

  • Research Support, Non-U.S. Gov't