Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses

Opt Express. 2011 Aug 1;19(16):15069-76. doi: 10.1364/OE.19.015069.

Abstract

Hard x-ray microscopy with nanometer resolution will open frontiers in the study of materials and devices, environmental sciences, and life sciences by utilizing the unique characterization capabilities of x-rays. Here we report two-dimensional nanofocusing by multilayer Laue lenses (MLLs), a type of diffractive optics that is in principle capable of focusing x-rays to 1 nm. We demonstrate focusing to a 25 × 27 nm(2) FWHM spot with an efficiency of 2% at a photon energy of 12 keV, and to a 25 × 40 nm(2) FWHM spot with an efficiency of 17% at a photon energy of 19.5 keV.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Animals
  • Equipment Design
  • Humans
  • Lenses
  • Microscopy / methods*
  • Microscopy, Electron, Scanning / methods
  • Microscopy, Fluorescence / methods
  • Nanotechnology / methods*
  • Optics and Photonics / methods
  • Photons
  • X-Rays