Electrets are dielectric materials possessing a quasi-permanent electric charge or dipole polarization. Frequently, the electrets are adversely affected by environmental temperature and humidity, leading to charge instability, which severely restricts applications. Here we show that silicon nanowires (SiNWs) via modified oxide-assisted growth can surprisingly serve as electrets with permanent electrostatic charges and surface potential up to 7.7 mV. Significantly, the extraordinary electret behavior of SiNWs is extremely robust, remaining stable against immersion in water for over 2 months. The SiNWs were utilized to fabricate a nanogenerator, which yielded an output electrical power of 2.19 × 10(-11) W with a conversion efficiency of 2.2%. The nanogenerator consists of only one movable part, giving highly sustainable and stable output signals, and thus holds promise for various self-powered applications. The permanent electrostatic charges on SiNWs are attributed to the formation of α-quartz in SiNWs.