Laser direct writing of rotationally symmetric high-resolution structures

Appl Opt. 2011 Nov 1;50(31):5983-9. doi: 10.1364/AO.50.005983.

Abstract

We present a laser direct writing system for the efficient fabrication of high-resolution axicon structures. The setup makes use of scanning beam interference lithography incorporated with a fringe locking scheme for tight fringe phase control and allows us to fabricate large area structures with a period down to 450 nm.