Quantitative measurement of in-plane cantilever torsion for calibrating lateral piezoresponse force microscopy

Hyunwoo Choi; Seungbum Hong; Kwangsoo No

doi:10.1063/1.3660806

Quantitative measurement of in-plane cantilever torsion for calibrating lateral piezoresponse force microscopy

Rev Sci Instrum. 2011 Nov;82(11):113706. doi: 10.1063/1.3660806.

Authors

Hyunwoo Choi¹, Seungbum Hong, Kwangsoo No

Affiliation

¹ Materials Science Division, Argonne National Laboratory, Lemont, Illinois 60439, USA.

PMID: 22128983
DOI: 10.1063/1.3660806

Abstract

A simple quantitative measurement procedure of in-plane cantilever torsion for calibrating lateral piezoresponse force microscopy is presented. This technique enables one to determine the corresponding lateral inverse optical lever sensitivity (LIOLS) of the cantilever on the given sample. Piezoelectric coefficient, d(31) of BaTiO(3) single crystal (-81.62 ± 40.22 pm/V) which was calculated using the estimated LIOLS was in good agreement with the reported value in literature.