High quality p-type Ag-doped ZnO thin films achieved under elevated growth temperatures

J Phys Condens Matter. 2012 Apr 11;24(14):145802. doi: 10.1088/0953-8984/24/14/145802. Epub 2012 Mar 15.

Abstract

By correlating the effects of substrate temperature, oxygen pressure and laser energy on the electrical and microstructural properties of Ag-doped ZnO films grown on a sapphire (0001) substrate, p-type conductivity is achieved under various substrate temperatures in the wide range of 250-750 °C. All of the samples were deposited by pulsed-laser deposition under various designed conditions. Hall measurements indicate that the best conductivity is achieved in Ag-ZnO films under a substrate temperature of 500 °C, a partial oxygen pressure of 250-300 mTorr and laser energy between 330 and 345 mJ. The hole-carrier concentration is 2.29 × 10(18) cm(-3), the resistivity is 0.9 Ω cm and the mobility is 3.03 cm(2) V(-1) s(-1). Transmission-electron microscopy (TEM) studies on the p-type films reveal similar microstructural properties to one another, but different properties to that of the n-type films deposited at the same temperatures with different deposition parameters.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Aluminum Oxide / chemistry*
  • Lasers*
  • Microscopy, Electron, Transmission
  • Nanotechnology*
  • Silver / chemistry*
  • Surface Properties
  • Temperature
  • X-Ray Diffraction
  • Zinc Oxide / chemistry*

Substances

  • Silver
  • Aluminum Oxide
  • Zinc Oxide