CMOS image sensor integrated with micro-LED and multielectrode arrays for the patterned photostimulation and multichannel recording of neuronal tissue

Opt Express. 2012 Mar 12;20(6):6097-108. doi: 10.1364/OE.20.006097.

Abstract

We developed a complementary metal oxide semiconductor (CMOS) integrated device for optogenetic applications. This device can interface via neuronal tissue with three functional modalities: imaging, optical stimulation and electrical recording. The CMOS image sensor was fabricated on 0.35 μm standard CMOS process with built-in control circuits for an on-chip blue light-emitting diode (LED) array. The effective imaging area was 2.0 × 1.8 mm². The pixel array was composed of 7.5 × 7.5 μm² 3-transistor active pixel sensors (APSs). The LED array had 10 × 8 micro-LEDs measuring 192 × 225 μm². We integrated the device with a commercial multichannel recording system to make electrical recordings.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Action Potentials / physiology*
  • Animals
  • Electric Stimulation / instrumentation*
  • Equipment Design
  • Equipment Failure Analysis
  • Humans
  • Lighting / instrumentation*
  • Microelectrodes*
  • Microscopy / instrumentation*
  • Miniaturization
  • Neurons / physiology*
  • Photic Stimulation / instrumentation*
  • Semiconductors
  • Systems Integration