Directional photofluidization lithography: micro/nanostructural evolution by photofluidic motions of azobenzene materials

Adv Mater. 2012 Apr 24;24(16):2069-103. doi: 10.1002/adma.201104826. Epub 2012 Mar 27.

Abstract

This review demonstrates directional photofluidization lithography (DPL), which makes it possible to fabricate a generic and sophisticated micro/nanoarchitecture that would be difficult or impossible to attain with other methods. In particular, DPL differs from many of the existing micro/nanofabrication methods in that the post-treatment (i.e., photofluidization), after the preliminary fabrication process of the original micro/nanostructures, plays a pivotal role in the various micro/nanostructural evolutions including the deterministic reshaping of architectures, the reduction of structural roughness, and the dramatic enhancement of pattern resolution. Also, DPL techniques are directly compatible with a parallel and scalable micro/nanofabrication. Thus, DPL with such extraordinary advantages in micro/nanofabrication could provide compelling opportunities for basic micro/nanoscale science as well as for general technology applications.

Publication types

  • Research Support, Non-U.S. Gov't
  • Review

MeSH terms

  • Azo Compounds / chemistry*
  • Microtechnology / methods*
  • Motion*
  • Nanostructures / chemistry*
  • Nanotechnology / methods*
  • Printing / methods*

Substances

  • Azo Compounds
  • azobenzene