Synthesis of large-area MoS2 atomic layers with chemical vapor deposition

Adv Mater. 2012 May 2;24(17):2320-5. doi: 10.1002/adma.201104798. Epub 2012 Mar 30.

Abstract

Large-area MoS(2) atomic layers are synthesized on SiO(2) substrates by chemical vapor deposition using MoO(3) and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS(2) monolayer. The TEM images verify that the synthesized MoS(2) sheets are highly crystalline.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Disulfides / chemistry*
  • Gases / chemistry*
  • Molybdenum / chemistry*
  • Nanostructures / chemistry
  • Nanostructures / ultrastructure
  • Oxides / chemistry
  • Silicon Dioxide / chemistry

Substances

  • Disulfides
  • Gases
  • Oxides
  • molybdenum trioxide
  • Silicon Dioxide
  • Molybdenum
  • molybdenum disulfide