Real space soft x-ray imaging at 10 nm spatial resolution

W Chao; P Fischer; T Tyliszczak; S Rekawa; E Anderson; P Naulleau

doi:10.1364/OE.20.009777

Real space soft x-ray imaging at 10 nm spatial resolution

Opt Express. 2012 Apr 23;20(9):9777-83. doi: 10.1364/OE.20.009777.

Authors

W Chao¹, P Fischer, T Tyliszczak, S Rekawa, E Anderson, P Naulleau

Affiliation

¹ Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA. [email protected]

PMID: 22535070
DOI: 10.1364/OE.20.009777

Abstract

Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.

Publication types

Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

Equipment Design
Equipment Failure Analysis
Image Enhancement / instrumentation*
Microscopy / instrumentation*
Radiography / instrumentation*
Refractometry / instrumentation*