Direct-write non-linear photolithography for semiconductor nanowire characterization

Nanotechnology. 2012 Aug 24;23(33):335704. doi: 10.1088/0957-4484/23/33/335704. Epub 2012 Aug 3.

Abstract

A practical bottleneck prohibiting the rapid, confident and damage-free electrical contacting of vapour-liquid-solid grown nanowires arises from the random spatial distribution and variation in quality of the nanowires, and the contact dimensions required. Established techniques such as electron-beam lithography or focused ion-beam deposition have challenges in scaling, damage or complexity that can make a large statistical sample difficult. We present a direct laser-writing technique to allow rapid electrical contacting of nanowires on a large variety of substrates.

Publication types

  • Research Support, Non-U.S. Gov't