Electromechanical tuning of vertically-coupled photonic crystal nanobeams

Opt Express. 2012 Aug 13;20(17):19255-63. doi: 10.1364/OE.20.019255.

Abstract

We present the design, the fabrication and the characterization of a tunable one-dimensional (1D) photonic crystal cavity (PCC) etched on two vertically-coupled GaAs nanobeams. A novel fabrication method which prevents their adhesion under capillary forces is introduced. We discuss a design to increase the flexibility of the structure and we demonstrate a large reversible and controllable electromechanical wavelength tuning (> 15 nm) of the cavity modes.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer-Aided Design
  • Equipment Design
  • Equipment Failure Analysis
  • Light
  • Micro-Electrical-Mechanical Systems / instrumentation*
  • Nanotechnology / instrumentation*
  • Photons
  • Surface Plasmon Resonance / instrumentation*