Concurrent polarization retrieval in multi-heterodyne scanning near-field optical microscopy: validation on silicon form-birefringent grating

Opt Express. 2012 Oct 8;20(21):23088-99. doi: 10.1364/OE.20.023088.

Abstract

We demonstrate a concurrent polarization-retrieval algorithm based on a multi-heterodyne scanning near-field optical microscopy (MH-SNOM) measurement system. This method relies on calibration of the polarization properties of the MH-SNOM using an isotropic region of the sample in the vicinity of the nanostructures of interest. We experimentally show the effectiveness of the method on a silicon form-birefringent grating (FBG) with significant polarization diversity. Three spatial dimensional near-field measurements are in agreement with theoretical predictions obtained with rigorous coupled-wave analysis (RCWA). Pseudo-far-field measurements are performed to obtain the effective refractive index of the FBG, emphasizing the validity of the proposed method. This reconstruction algorithm makes the MH-SNOM a powerful tool to analyze concurrently the polarization-dependent near-field optical response of nanostructures with sub wavelength resolution as long as a calibration area is available in close proximity.

Publication types

  • Research Support, Non-U.S. Gov't
  • Validation Study

MeSH terms

  • Algorithms*
  • Birefringence
  • Equipment Design
  • Equipment Failure Analysis
  • Microscopy, Atomic Force / instrumentation*
  • Microscopy, Atomic Force / methods
  • Microscopy, Confocal / instrumentation*
  • Microscopy, Confocal / methods
  • Refractometry / instrumentation*