Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope

Rev Sci Instrum. 2013 Mar;84(3):033701. doi: 10.1063/1.4774387.

Abstract

Synchrotron based x-ray microscopy established itself as a prominent tool for noninvasive investigations in many areas of science and technology. Many facilities around the world routinely achieve sub-micrometer resolution with a few instruments capable of imaging with the spatial resolution better than 100 nm. With an ongoing effort to push the 2D/3D resolution down to 10 nm in the hard x-ray regime both fabrication of the nano-focusing optics and stability of a microscope become extremely challenging. In this work we present our approach to overcome technical challenges on the path towards high spatial resolution hard x-ray microscopy and demonstrate the performance of a scanning fluorescence microscope equipped with the multilayer Laue lenses focusing optics.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.