Compact prototype apparatus for reducing the circle of confusion down to 40 nm for x-ray nanotomography

Rev Sci Instrum. 2013 Mar;84(3):035006. doi: 10.1063/1.4798546.

Abstract

We have constructed a compact prototype apparatus for active correction of circle of confusion during rotational motion. Our system combines fiber optic interferometry as a sensing element, the reference cylinder along with the nanopositioning system, and a robust correction algorithm. We demonstrate dynamic correction of run-out errors down to 40 nm; the resolution is limited by ambient environment and accuracy of correcting nanopositioners. Our approach provides a compact solution for in-vacuum scanning nanotomography x-ray experiments with a potential to reach sub-nm level of correction.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.