Image sensor pixel with on-chip high extinction ratio polarizer based on 65-nm standard CMOS technology

Opt Express. 2013 May 6;21(9):11132-40. doi: 10.1364/OE.21.011132.

Abstract

In this study, we demonstrate a polarization sensitive pixel for a complementary metal-oxide-semiconductor (CMOS) image sensor based on 65-nm standard CMOS technology. Using such a deep-submicron CMOS technology, it is possible to design fine metal patterns smaller than the wavelengths of visible light by using a metal wire layer. We designed and fabricated a metal wire grid polarizer on a 20 × 20 μm(2) pixel for image sensor. An extinction ratio of 19.7 dB was observed at a wavelength 750 nm.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Equipment Design
  • Equipment Failure Analysis
  • Image Enhancement / instrumentation*
  • Photography / instrumentation*
  • Refractometry / instrumentation*
  • Semiconductors*
  • Signal Processing, Computer-Assisted / instrumentation*
  • Transducers*