We consider the superradiance of an extended relativistic electron bunch moving over a periodically corrugated surface for the generation of multimegawatt terahertz pulses. To study the above process we have developed a three-dimensional, self-consistent, quasioptical theory of Cherenkov stimulated emission which includes a description of the formation of an evanescent wave over a corrugated surface and its excitation by rf current induced in the electron bunch.