This paper introduces a hybrid control method that combines strain feedback control and charge driver. Strain feedback control method has good stability at low frequencies but suffers from limited resolution at high frequencies. The charge driver provides good linearity at high frequencies but exhibits drift at low frequencies. This study combines these two control methods to demonstrate that high stability at low frequencies as well as good linearity and high resolution at high frequencies can be achieved. Theoretical analyses are provided in detail. Experimental results demonstrate the proposed hybrid control method can provide excellent stability, good linearity and high resolution from 0.01 Hz to 50 Hz.