Y2O3-doped IZO (YIZO) films was investigated in order to control the carrier concentration of semiconducting IZO layer. Stoichiometric thin YIZO films were deposited on glass substrates by RF magnetron sputtering method using indium zinc oxide (IZO) including 50 wt.% ZnO and Y2O3 targets. During the deposition of YIZO films, the working pressure was fixed at 0.17 Pa and the deposition temperature was kept at room temperature while the oxygen partial pressure (P(O2)) was changed to find the optimal film condition. In order to check the PO2 effect on structural, electrical and optical properties of the grown YIZO layer on glass, X-ray diffraction (XRD) was employed to analyze the structure of YIZO films and the electrical properties were characterized by Hall measurements using the Van der Pauw geometry at room temperature. From the measured XRD patterns, exhibiting crystalline peak of the YIZO film deposited under PO2 condition is revealed while amorphous phase structure is only observed from the YIZO film deposited under pure Ar gas condition. As the O2 contents in gas increase, the resistivity of YIZO film also drastically increases, whereas the carrier concentration of the YIZO films sharply decreases with mobility.