Surface passivation of a photonic crystal band-edge laser by atomic layer deposition of SiO2 and its application for biosensing

Nanoscale. 2015 Feb 28;7(8):3565-71. doi: 10.1039/c4nr07552h.

Abstract

We report on the conformal surface passivation of photonic crystal (PC) laser devices with an ultrathin dielectric layer. Air-bridge-type Γ-point band-edge lasers (BELs) are fabricated by forming a honeycomb lattice two-dimensional PC structure into an InGaAsP multiple-quantum-well epilayer. Atomic layer deposition (ALD) is employed for conformal deposition of a few-nanometer-thick SiO2 layer over the entire device surface, not only on the top and bottom surfaces of the air-bridge membrane but also on the air-hole sidewalls. Despite its extreme thinness, the ALD passivation layer is found to protect the InGaAsP BEL devices from harsh chemicals. In addition, the ALD-SiO2 is compatible with the silane-based surface chemistry, which allows us to use ALD-passivated BEL devices as label-free biosensors. The standard streptavidin-biotin interaction shifts the BEL lasing wavelength by ∼1 nm for the dipole-like Γ-point band-edge mode. A sharp lasing line (<0.2 nm, full width at half-maximum) and a large refractive index sensitivity (∼163 nm per RIU) produce a figure of merit as high as ∼800 for our BEL biosensor, which is at least an order of magnitude higher than those of more common biosensors that rely on a broad resonance peak, showing that our nanolaser structures are suitable for highly sensitive biosensor applications.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Biosensing Techniques*
  • Biotin / chemistry
  • Crystallization
  • Equipment Design
  • Lasers
  • Light
  • Nanostructures
  • Nanotechnology / methods*
  • Optics and Photonics
  • Photons
  • Refractometry
  • Silanes / chemistry
  • Silicon Dioxide / chemistry*
  • Streptavidin / chemistry
  • Surface Properties
  • Vibration

Substances

  • Silanes
  • Biotin
  • Silicon Dioxide
  • Streptavidin