Fabrication and characterization of high-contrast mid-infrared GeTe₄ channel waveguides

Opt Lett. 2015 May 1;40(9):2016-9. doi: 10.1364/OL.40.002016.

Abstract

We report the fabrication and characterization of high index contrast (Δn≈0.9) GeTe4 channel waveguides on ZnSe substrate for evanescent-field-based biosensing applications in the mid-IR spectral region. GeTe4 films were deposited by RF sputtering and characterized for their structure, composition, transparency, and dispersion. The lift-off technique was used to pattern the waveguide channels. Waveguiding from 2.5-3.7 and 6.4-7.5 μm was demonstrated, and mode intensity profile and estimated propagation losses are given for the 3.5 μm wavelength.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Equipment Design
  • Germanium*
  • Infrared Rays*
  • Optical Imaging / instrumentation
  • Optical Imaging / methods*
  • Optical Phenomena
  • Tellurium*

Substances

  • Germanium
  • Tellurium