Compact permanent magnet H⁺ ECR ion source with pulse gas valve

Y Iwashita; H Tongu; Y Fuwa; M Ichikawa

doi:10.1063/1.4934619

Compact permanent magnet H⁺ ECR ion source with pulse gas valve

Rev Sci Instrum. 2016 Feb;87(2):02A718. doi: 10.1063/1.4934619.

Authors

Y Iwashita¹, H Tongu¹, Y Fuwa¹, M Ichikawa²

Affiliations

¹ Institute for Chemical Research, Kyoto University, Uji, Kyoto 611-0011, Japan.
² Japan Atomic Research Agency, Naka, Ibaraki 311-0193, Japan.

PMID: 26931936
DOI: 10.1063/1.4934619

Abstract

Compact H(+) ECR ion source using permanent magnets is under development. Switching the hydrogen gas flow in pulse operations can reduce the gas loads to vacuum evacuation systems. A specially designed piezo gas valve chops the gas flow quickly. A 6 GHz ECR ion source equipped with the piezo gas valve is tested. The gas flow was measured by a fast ion gauge and a few ms response time is obtained.