Fabrication of Conductive 3D Gold-Containing Microstructures via Direct Laser Writing

Eva Blasco; Jonathan Müller; Patrick Müller; Vanessa Trouillet; Markus Schön; Torsten Scherer; Christopher Barner-Kowollik; Martin Wegener

doi:10.1002/adma.201506126

Fabrication of Conductive 3D Gold-Containing Microstructures via Direct Laser Writing

Adv Mater. 2016 May;28(18):3592-5. doi: 10.1002/adma.201506126. Epub 2016 Mar 8.

Authors

Eva Blasco^{1

2}, Jonathan Müller^{3

4}, Patrick Müller^{3

4}, Vanessa Trouillet⁵, Markus Schön⁶, Torsten Scherer⁶, Christopher Barner-Kowollik^{1

2}, Martin Wegener^{3

4}

Affiliations

¹ Preparative Macromolecular Chemistry Institut für Technische Chemie und Polymerchemie, Karlsruhe Institute of Technology (KIT), Engesserstr. 18, 76128, Karlsruhe, Germany.
² Institut für Biologische Grenzflächen, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany.
³ Institute of Applied Physics, Karlsruhe Institute of Technology (KIT), Wolfgang-Gaede-Straße 1, 76128, Karlsruhe, Germany.
⁴ Institute of Nanotechnology, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany.
⁵ Institute of Applied Materials (IAM) and Karlsruhe Nano Micro Facility (KNMF), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany.
⁶ Institute of Nanotechnology (INT) and Karlsruhe Nano Micro Facility (KNMF), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany.

PMID: 26953811
DOI: 10.1002/adma.201506126

Abstract

3D conductive microstructures containing gold are fabricated by simultaneous photopolymerization and photoreduction via direct laser writing. The photoresist employed consists of water-soluble polymers and a gold precursor. The fabricated microstructures show good conductivity and are successfully employed for 3D connections between gold pads.

Keywords: direct laser writing; microstructures; photoreduction; two-photon absorption.

Publication types

Research Support, Non-U.S. Gov't