Development of a fluorescence based flux sensor for thin film growth and nanoparticle deposition

Rev Sci Instrum. 2016 Jul;87(7):075112. doi: 10.1063/1.4958823.

Abstract

An optical flux sensor, based on the fluorescence properties of materials and nanoparticles, has been developed to control the deposition rate in thin film deposition systems. Using a simple diode laser and a photomultiplier tube with a light filter, we report the detection of gallium atoms and CdSe-ZnS quantum dots. This setup has a high sensitivity and reproducibility.