Superacid Passivation of Crystalline Silicon Surfaces

ACS Appl Mater Interfaces. 2016 Sep 14;8(36):24205-11. doi: 10.1021/acsami.6b07822. Epub 2016 Aug 31.

Abstract

The reduction of parasitic recombination processes commonly occurring within the silicon crystal and at its surfaces is of primary importance in crystalline silicon devices, particularly in photovoltaics. Here we explore a simple, room temperature treatment, involving a nonaqueous solution of the superacid bis(trifluoromethane)sulfonimide, to temporarily deactivate recombination centers at the surface. We show that this treatment leads to a significant enhancement in optoelectronic properties of the silicon wafer, attaining a level of surface passivation in line with state-of-the-art dielectric passivation films. Finally, we demonstrate its advantage as a bulk lifetime and process cleanliness monitor, establishing its compatibility with large area photoluminescence imaging in the process.

Keywords: bulk lifetime; photoluminescence imaging; photovoltaics; silicon; surface passivation.