Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials

Na Liu; Feifei Wang; Lianqing Liu; Haibo Yu; Shaorong Xie; Jun Wang; Yuechao Wang; Gwo-Bin Lee; Wen J Li

doi:10.1038/srep32106

Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials

Sci Rep. 2016 Aug 26:6:32106. doi: 10.1038/srep32106.

Authors

Na Liu^{1

2}, Feifei Wang^{1

3}, Lianqing Liu¹, Haibo Yu¹, Shaorong Xie², Jun Wang⁴, Yuechao Wang¹, Gwo-Bin Lee^{1

5}, Wen J Li^{1

6}

Affiliations

¹ State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China.
² School of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200072, China.
³ University of Chinese Academy of Sciences, Beijing, 100049, China.
⁴ Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
⁵ Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan.
⁶ Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong.

Abstract

The synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method.

Publication types

Research Support, Non-U.S. Gov't